The Minimization of the Defects of Monocrystal Substrates Surface Structural and Geometric Parameters

Authors

  • J. Margelevicius

Abstract

In this study the mechanism of monocrystal substrates surface structure and geometric deviation formation during the technological process were investigated. The model of the deepness of crystallographic structure surface defects layer was presented. The analysis on cinematic parameters of technological process was performed and experimental results were presented. The geometric control system was presented.

Published

1999-01-14

How to Cite

Margelevicius, J. (1999). The Minimization of the Defects of Monocrystal Substrates Surface Structural and Geometric Parameters. Elektronika Ir Elektrotechnika, 19(1). Retrieved from https://eejournal.ktu.lt/index.php/elt/article/view/16477

Issue

Vol. 19 No. 1 (1999)

Section

Articles

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