Research of Transference Mechanism and Struc-tural Changes of Micro-Optical Surfaces

Abstract

The aim of this work was search of technological ways for transfering of micro-optical surfaces into flexible joint Ni matrix from polymer surfaces minimizing structural changes and mechanical stresses. Different polymer materials were used for basis of joint Ni matrix formation. Polymer surfaces were treated by high frequency N2+O2 and Ar gas mixture plasma to decrease mechanical stresses. Regimes of microembossing were established for polymer materials. Different metal (Al, Cu, Niv, Ti, Cr) and dielectric (SiO2, TiO2) vacuum and electrochemical sulfamate Ni coatings were used in this work. It is shown, that the smallest structural changes were obtained in structures PMMA-Niv-Nie ir FP- Niv-Nie.