Research of Thin Aluminium Vacuum Coatings

Authors

  • V. Grigaliunas
  • V. Kopustinskas
  • K. Slapikas
  • J. Margelevicius
  • M. Andrulevicius

Abstract

There was researched the influence of technological parameters for thin Al vacuum coatings on the polymeric surface having microoptical difraction relief. Composition of layers is shown by X - ray photoelectron spectroscopy analysis. Optical properties were studied by laser elipsometry analysis.

Published

1997-08-28

How to Cite

Grigaliunas, V., Kopustinskas, V., Slapikas, K., Margelevicius, J., & Andrulevicius, M. (1997). Research of Thin Aluminium Vacuum Coatings. Elektronika Ir Elektrotechnika, 12(3). Retrieved from https://eejournal.ktu.lt/index.php/elt/article/view/15869

Issue

Vol. 12 No. 3 (1997)

Section

Articles

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