Research of Thin Aluminium Vacuum Coatings

V. Grigaliunas; V. Kopustinskas; K. Slapikas; J. Margelevicius; M. Andrulevicius

Research of Thin Aluminium Vacuum Coatings

Authors

V. Grigaliunas
V. Kopustinskas
K. Slapikas
J. Margelevicius
M. Andrulevicius

Abstract

There was researched the influence of technological parameters for thin Al vacuum coatings on the polymeric surface having microoptical difraction relief. Composition of layers is shown by X - ray photoelectron spectroscopy analysis. Optical properties were studied by laser elipsometry analysis.

Published

1997-08-28

Issue

Vol. 12 No. 3 (1997)

Section

Articles

License

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How to Cite

Research of Thin Aluminium Vacuum Coatings. (1997). Elektronika Ir Elektrotechnika, 12(3). https://eejournal.ktu.lt/index.php/elt/article/view/15869