Rational Parameters Selection Influence to the Adequate Selection Algorithm by Estimating Local Oxide Influence
The production process is a sequence of operations in order to obtain the implementation of the elements or integrated structures with the necessary performance characteristics of the very large scale integration. In this case the manufacture of integrated circuits focuses on the area where the integrated element is being formed. It is essential that the area dimensions at the beginning of the technological processes must be kept the same during the whole technological process. Rational parameters are defined of the thermal process simulation, creating the LOCOS, where the t=90 min, T=1100 ºC, SiO2=0,02 μm, Si3N4=0,1 μm (PO2=1 atm) in the three-dimensional integrated structures. Ill. 6, bibl. 5 (in English; summaries in English, Russian and Lithuanian).
How to Cite
The copyright for the paper in this journal is retained by the author(s) with the first publication right granted to the journal. The authors agree to the Creative Commons Attribution 4.0 (CC BY 4.0) agreement under which the paper in the Journal is licensed.
By virtue of their appearance in this open access journal, papers are free to use with proper attribution in educational and other non-commercial settings with an acknowledgement of the initial publication in the journal.