Thin Film Transistors Gas Sensors: Materials, Manufacturing

Abstract

The development of large area electronics gas sensors is reported, by focusing on the breakthroughs of thin-film transistor technologies. Thin-film transistors are analysed in terms of structure, their manufacturing materials and their properties. Deposition, crystallization and post-treatment methods and how the parameters of those methods affect the electrical properties of the thin-film transistor and in turn, the performance of the thin-film sensor, are also reported. A brief analysis on the structure, manufacture and test results of air-gap thin-film transistors, that showed high sensitivity values for certain gases, concludes this paper. Ill. 2, bibl. 24 (in English; summaries in English, Russian and Lithuanian).