Thin Film Transistors Gas Sensors: Materials, Manufacturing

Authors

  • M. C. Pereira
  • M. J. Martins
  • O. Bonnaud

Abstract

The development of large area electronics gas sensors is reported, by focusing on the breakthroughs of thin-film transistor technologies. Thin-film transistors are analysed in terms of structure, their manufacturing materials and their properties. Deposition, crystallization and post-treatment methods and how the parameters of those methods affect the electrical properties of the thin-film transistor and in turn, the performance of the thin-film sensor, are also reported. A brief analysis on the structure, manufacture and test results of air-gap thin-film transistors, that showed high sensitivity values for certain gases, concludes this paper. Ill. 2, bibl. 24 (in English; summaries in English, Russian and Lithuanian).

Author Biographies

M. C. Pereira

M. J. Martins

O. Bonnaud

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Published

2009-01-03

How to Cite

Pereira, M. . C., Martins, M. J., & Bonnaud, O. (2009). Thin Film Transistors Gas Sensors: Materials, Manufacturing. Elektronika Ir Elektrotechnika, 89(1), 39-44. Retrieved from https://eejournal.ktu.lt/index.php/elt/article/view/10558

Issue

Section

T 170 ELECTRONICS