Research of the Method Opportunities of Growing Films Conductance Measurement

Authors

  • V. Sinkevičius KTU Panevezys Institute

Abstract

The methods of the non-invasive conductance measurement of the growing thin films were analyzed using the measurement probe with two contact areas. It was determined, that it is possible to reach the extreme of the signal for the layers from the island stage to the continuous layers, choosing the measurements of the substrate, measurement resistance or configuration. Ill. 10, bibl. 11 (in English; summaries in English, Russian and Lithuanian).

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Published

2009-04-19

How to Cite

Sinkevičius, V. (2009). Research of the Method Opportunities of Growing Films Conductance Measurement. Elektronika Ir Elektrotechnika, 92(4), 71-74. Retrieved from https://eejournal.ktu.lt/index.php/elt/article/view/10250

Issue

Vol. 92 No. 4 (2009)

Section

T 190 ELECTRICAL ENGINEERING

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