Naujokaitis, R., Kaunas University of Technology, Lithuania
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Elektronika ir Elektrotechnika Vol. 47 No. 5 (2003) - T 171 MICROELECTRONICS
A Study of Cd SnO Thin Film Deposited at Low Temperature using Reactive Magnetron Sputtering
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Elektronika ir Elektrotechnika Vol. 63 No. 7 (2005) - T 171 MICROELECTRONICS
Deposition of ZnO Layers Using Planar Reactive Magnetron System
Abstract PDF