Semiconductor Elements Self-formation based on Qualitative Spatial
Abstract
Automated engineering technologies (e.g. self-formation) for manufacturing of electron devices are widely popular in microelectronics. Topological approach allows for analysis and synthesis of such real world object structures: transistors, solar cells. The analysis of such object structures in order to meet defined electrical characteristics becomes an actual problem since it is an extremely labour consuming process. Automatic recognition of self-formed semiconductor elements, which can speed up the analysis process, is discussed in this paper. The idea of using qualitative spatial formalisms for analysis of semiconductor element structures is presented. Reliable criteria for semiconductor elements classification with presumptive further use in structure recognition of various self-formed semiconductor element sets were proposed. Ill. 5, bibl. 14 (in English; summaries in English, Russian and Lithuanian).
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