Structural Model of Electronic Device Manufacturing Process Quality
It is offered to assess the level of manufacturing quality by using quality transfer functions of separate processes. A part of process structure of micro-circuit manufacturing was selected for modeling. Quality transfer function was created for a part of micro-circuit manufacturing process. Flow sizes of circulating ED components during manufacturing processes are considered when calculating this function. Overall micro-circuit quality level calculation technique and integral ED quality model was introduced. Operator for global or partial ED manufacturing quality level optimization was presented. Ill. 1, bibl. 4 (in English; summaries in English, Russian and Lithuanian).
Authors retain copyright and grant the journal the right of the first publication with the paper simultaneously licensed under the Creative Commons Attribution 4.0 (CC BY 4.0) licence.
Authors are allowed to enter into separate, additional contractual arrangements for the non-exclusive distribution of the paper published in the journal with an acknowledgement of the initial publication in the journal.
Copyright terms are indicated in the Republic of Lithuania Law on Copyright and Related Rights, Articles 4-37.