J. Margelevicius, “The Minimization of the Defects of Monocrystal Substrates Surface Structural and Geometric Parameters”, ELEKTRON ELEKTROTECH, vol. 19, no. 1, Jan. 1999, Accessed: Jan. 22, 2026. [Online]. Available: https://eejournal.ktu.lt/index.php/elt/article/view/16477