A. Grigonis and S. Joneliunas, “Anomalous Oxidation of GaAs in the CF2Cl2/O2 Plasma”, ELEKTRON ELEKTROTECH, vol. 13, no. 4, Nov. 1997, Accessed: Jan. 22, 2026. [Online]. Available: https://eejournal.ktu.lt/index.php/elt/article/view/15902