Thermal Oxidation Process Influence to the Three-Dimensional Integrated Structures. Elektronika ir Elektrotechnika, [S. l.], v. 96, n. 8, p. 51–54, 2009. Disponível em: https://eejournal.ktu.lt/index.php/elt/article/view/9967.. Acesso em: 6 dec. 2025.