Daugėla J, Joneliūnas S, Jotautis A, Naujokaitis R, Klovaitė E. Deposition of ZnO Layers Using Planar Reactive Magnetron System. ELEKTRON ELEKTROTECH [Internet]. 2005Aug.20 [cited 2024Nov.21];63(7):70-3. Available from: https://eejournal.ktu.lt/index.php/elt/article/view/10495