Morkvenaite-Vilkonciene I, Virzonis D, Vanagas G, Krikscikas V. Operating point of Capacitive Micromachined Ultrasonic Transducers with Sub-structural Elements. ELEKTRON ELEKTROTECH [Internet]. 2012Nov.9 [cited 2024Nov.21];18(9):43-6. Available from: https://eejournal.ktu.lt/index.php/elt/article/view/2804