Investigation of Leakage Current in Micro M-I-M Structure Using Multilayer High-K Dielectric Materials with COMSOL Multiphysics. ELEKTRON ELEKTROTECH [Internet]. 2022 Apr. 28 [cited 2025 Dec. 5];28(2):72-7. Available from: https://eejournal.ktu.lt/index.php/elt/article/view/28102