Sapeliauskas, Evaldas, Dovydas Barauskas, Gailius Vanagas, Donatas Pelenis, and Darius Viržonis. “Design, Fabrication and Testing of Surface Micromachined CMUTs for Surface and Interface Waves”. Elektronika ir Elektrotechnika 22, no. 5 (November 4, 2016): 69 - 73. Accessed September 30, 2022. https://eejournal.ktu.lt/index.php/elt/article/view/7123.