Kopustinskas, V., V. Grigaliunas, M. Andrulevicius, and J. Margelevicius. “Plasmochemical Deposition of an Ultrathin (CFx)n Film”. Elektronika ir Elektrotechnika 14, no. 1 (January 14, 1998). Accessed May 3, 2024. https://eejournal.ktu.lt/index.php/elt/article/view/15946.