Kersys, T., R. Anilionis, and D. Eidukas. “Simulation of Doped Si Oxidation in Nano-Dimension Scale”. Elektronika ir Elektrotechnika 84, no. 4 (April 19, 2008): 43-46. Accessed March 28, 2024. https://eejournal.ktu.lt/index.php/elt/article/view/11126.