Andriukaitis, D., and R. Anilionis. “Thermal Oxidation Process Influence to the Three-Dimensional Integrated Structures”. Elektronika ir Elektrotechnika 96, no. 8 (October 20, 2009): 51-54. Accessed December 22, 2024. https://eejournal.ktu.lt/index.php/elt/article/view/9967.