Grigonis, A., and S. Joneliunas. “Anomalous Oxidation of GaAs in the CF2Cl2/O2 Plasma”. Elektronika ir Elektrotechnika 13, no. 4 (November 28, 1997). Accessed May 5, 2025. https://eejournal.ktu.lt/index.php/elt/article/view/15902.