D. Eidukas, R. Anilionis, and T. Keršys, “Using LOCOS Process in a MOSS Technology”, ELEKTRON ELEKTROTECH, vol. 61, no. 5, pp. 29–37, May 2005, Accessed: Jan. 22, 2026. [Online]. Available: https://eejournal.ktu.lt/index.php/elt/article/view/10433