D. Andriukaitis and R. Anilionis, “Thermal Oxidation in LOCOS, PBL and SWAMI Micro and Nano Structures”, ELEKTRON ELEKTROTECH, vol. 75, no. 3, pp. 23–26, Mar. 2007, Accessed: Jan. 22, 2026. [Online]. Available: https://eejournal.ktu.lt/index.php/elt/article/view/10465