Kersys, T., Anilionis, R. and Eidukas, D. (2008) “Simulation of Doped Si Oxidation in Nano-dimension Scale”, Elektronika ir Elektrotechnika, 84(4), pp. 43-46. Available at: https://eejournal.ktu.lt/index.php/elt/article/view/11126 (Accessed: 20April2024).