ANDRIUKAITIS, D.; ANILIONIS, R. Thermal Oxidation Process Influence to the Three-Dimensional Integrated Structures. Elektronika ir Elektrotechnika, [S. l.], v. 96, n. 8, p. 51-54, 2009. DisponĂ­vel em: https://eejournal.ktu.lt/index.php/elt/article/view/9967. Acesso em: 2 oct. 2022.