GRIGONIS, A. Plasma‚ÄďAssisted Materials Processing for Manufacturing of the VLSI Circuits. Elektronika ir Elektrotechnika, [S. l.], v. 28, n. 5, 2000. Dispon√≠vel em: https://eejournal.ktu.lt/index.php/elt/article/view/17464. Acesso em: 7 oct. 2022.