GRIGONIS, A. Plasma–Assisted Materials Processing for Manufacturing of the VLSI Circuits. Elektronika ir Elektrotechnika, [S. l.], v. 28, n. 5, 2000. Disponível em: https://eejournal.ktu.lt/index.php/elt/article/view/17464. Acesso em: 26 apr. 2024.