ANDRIUKAITIS, D.; ANILIONIS, R. Investigation of Etching Process in Nano Structures. Elektronika ir Elektrotechnika, [S. l.], v. 86, n. 6, p. 77-80, 2008. Disponível em: https://eejournal.ktu.lt/index.php/elt/article/view/11189. Acesso em: 4 dec. 2024.