ANDRIUKAITIS, D.; ANILIONIS, R. Thermal Oxidation in LOCOS, PBL and SWAMI Micro and Nano Structures. Elektronika ir Elektrotechnika, [S. l.], v. 75, n. 3, p. 23-26, 2007. Disponível em: https://eejournal.ktu.lt/index.php/elt/article/view/10465. Acesso em: 21 nov. 2024.