The Minimization of the Defects of Monocrystal Substrates Surface Structural and Geometric Parameters. Elektronika ir Elektrotechnika, [S. l.], v. 19, n. 1, 1999. Disponível em: https://eejournal.ktu.lt/index.php/elt/article/view/16477.. Acesso em: 5 dec. 2025.