Anomalous Oxidation of GaAs in the CF2Cl2/O2 Plasma. Elektronika ir Elektrotechnika, [S. l.], v. 13, n. 4, 1997. Disponível em: https://eejournal.ktu.lt/index.php/elt/article/view/15902.. Acesso em: 5 dec. 2025.