TY - JOUR AU - Stankus, V. AU - Dudonis, J. PY - 2000/09/19 Y2 - 2024/03/29 TI - Synthesis of PbTiO3 Thin Films by Reactive Magnetron Deposition JF - Elektronika ir Elektrotechnika JA - ELEKTRON ELEKTROTECH VL - 28 IS - 5 SE - DO - UR - https://eejournal.ktu.lt/index.php/elt/article/view/17466 SP - AB - <span>PbTiO</span><sub>3</sub><span> is one of the most important ferroelectric materials with perovskite structure, which has piezoelectric, pyroelectric and ferroelectric properties. The synthesis of complex PbTiO</span><sub>3</sub><span> thin films was researched in this work. It is a synthesis of PbTiO</span><sub>3</sub><span> thin films by reactive magnetron layer by layer deposition of Ti and Pb layers in a plasma of oxygen and oxygen-argon mixture and using a solid state reactions between them during annealing at different temperatures (200-700</span><sup>o</sup><span>C, 1 h) in atmosphere. For getting a stoichiometry of thin films the dependence of deposition rate on partial oxygen pressure, magnetron power and geometry were researched. XRD diffraction and optical properties analysis were investigated in order to research the structural and the phase changes which depends on annealed temperature. The crystallization of pyrochlore Pb</span><sub>2</sub><span>Ti</span><sub>2</sub><span>O</span><sub>6</sub><span> phase layers was observed at 200-400</span><sup>0</sup><span>C interval of temperatures. The perovskite PbTiO</span><sub>3</sub><span>phase appeared at 500</span><sup>0</sup><span>C.</span> ER -