TY - JOUR AU - Avakaw, S. AU - Jarsky, V. AU - Karpovich, S. AU - Tsitko, A. PY - 2008/04/19 Y2 - 2024/03/28 TI - Optical-mechanical equipment for the defect-free production of reticles JF - Elektronika ir Elektrotechnika JA - ELEKTRON ELEKTROTECH VL - 84 IS - 4 SE - DO - UR - https://eejournal.ktu.lt/index.php/elt/article/view/11142 SP - 94-96 AB - <p>The paper presents an integrated solution of a problem to develop a set of the equipment for the defect-free production of reticles and photomasks. The integrated approach to the equipment design allows to obtain certain advantages disclosed below. Accordingly, the paper highlights the following main issues: practical realization of these advantages in the special process equipment developed by the KBTEM-OMO enterprise; advantages in the development of a complete set of the special process equipment. Without taking into account technical and chemical processes, this complete set includes three component parts: Multi-beam laser pattern generator; Die-to- Database reticle inspection system; Laser reticle repair system. Ill. 1, tabl. 6, bibl. 3 (in English; summaries in English, Russian and Lithuanian).</p> ER -