@article{Avakaw_Jarsky_Karpovich_Tsitko_2008, title={Optical-mechanical equipment for the defect-free production of reticles}, volume={84}, url={https://eejournal.ktu.lt/index.php/elt/article/view/11142}, abstractNote={<p>The paper presents an integrated solution of a problem to develop a set of the equipment for the defect-free production of reticles and photomasks. The integrated approach to the equipment design allows to obtain certain advantages disclosed below. Accordingly, the paper highlights the following main issues: practical realization of these advantages in the special process equipment developed by the KBTEM-OMO enterprise; advantages in the development of a complete set of the special process equipment. Without taking into account technical and chemical processes, this complete set includes three component parts: Multi-beam laser pattern generator; Die-to- Database reticle inspection system; Laser reticle repair system. Ill. 1, tabl. 6, bibl. 3 (in English; summaries in English, Russian and Lithuanian).</p>}, number={4}, journal={Elektronika ir Elektrotechnika}, author={Avakaw, S. and Jarsky, V. and Karpovich, S. and Tsitko, A.}, year={2008}, month={Apr.}, pages={94-96} }