, Unitary Enterprise “KBTEM-OMO”, Belarus
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Elektronika ir Elektrotechnika Vol. 79 No. 7 (2007) - T 171 MICROELECTRONICS
Sub-Pixel Resolution by Die to Database Reticle Inspection
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Elektronika ir Elektrotechnika Vol. 84 No. 4 (2008) - T 170 ELECTRONICS
Optical-mechanical equipment for the defect-free production of reticles
Abstract PDF