Daugėla, J., Joneliūnas, S., Jotautis, A., Naujokaitis, R., & Klovaitė, E. (2005). Deposition of ZnO Layers Using Planar Reactive Magnetron System. Elektronika Ir Elektrotechnika, 63(7), 70-73. Retrieved from https://eejournal.ktu.lt/index.php/elt/article/view/10495