Design, Fabrication and Testing of Surface Micromachined CMUTs for Surface and Interface Waves

Authors

  • Evaldas Sapeliauskas Kaunas University of Technology
  • Dovydas Barauskas 1Kaunas University of Technology
  • Gailius Vanagas Kaunas University of Technology
  • Donatas Pelenis
  • Darius Viržonis Kaunas University of Technology

DOI:

https://doi.org/10.5755/j01.eie.22.5.7123

Keywords:

Acoustic transducers, microfluidics, microelectromechanical devices

Abstract

Interdigital CMUTs weredesigned and fabricated in transmit/receive pairs. Each transmitter or receiverhas 20 double-phase finger pairs with 146 micrometer pitch and 3 millimeter aperture.The wave transmission distance between the receiver and transmitter is 9millimeters. Devices were fabricated on the highly doped silicon wafers by thesurface micromachining technology using silicon nitride as the structuralmaterial and chromium as the sacrificial material. Interface (Scholte type)waves were transmitted and received at 100 V bias and 10 V pp 10 MHz 20 periodharmonic burst excitation. The wave propagation velocity in water andisopropanol were measured by the time-of-flight and spectral analysis methods.The last gave 1376 m/s and 1157 m/s phase velocity of the Scholte waves for water andisopropanol, correspondingly. At the same time, CMUT structural resonance inimmersion was 8.9 MHz for water and 9.3 MHz for isopropanol. This led to theconclusion about better informativity of the Scholte type waves.

DOI: http://dx.doi.org/10.5755/j01.eie.22.5.7123

Author Biographies

Evaldas Sapeliauskas, Kaunas University of Technology

Panevėžys Faculty of Technologies and Business

Dovydas Barauskas, 1Kaunas University of Technology

Panevėžys Faculty of Technologies and Business

Gailius Vanagas, Kaunas University of Technology

Panevėžys Faculty of Technologies and Business

Darius Viržonis, Kaunas University of Technology

Panevėžys Faculty of Technologies and Business

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Published

2016-11-04

How to Cite

Sapeliauskas, E., Barauskas, D., Vanagas, G., Pelenis, D., & Viržonis, D. (2016). Design, Fabrication and Testing of Surface Micromachined CMUTs for Surface and Interface Waves. Elektronika Ir Elektrotechnika, 22(5), 69 - 73. https://doi.org/10.5755/j01.eie.22.5.7123

Issue

Section

MICROELECTRONICS