Research of Thin Aluminium Vacuum Coatings

  • V. Grigaliunas Kauno technologijos universitetas
  • V. Kopustinskas
  • K. Slapikas
  • J. Margelevicius
  • M. Andrulevicius

Abstract

There was researched the influence of technological parameters for thin Al vacuum coatings on the polymeric surface having microoptical difraction relief. Composition of layers is shown by X - ray photoelectron spectroscopy analysis. Optical properties were studied by laser elipsometry analysis.
Published
1997-08-28
Section
Articles