Influence of Impurities on Structure and Electrical Properties of Copper Coatings

  • A. Meskauskas Kauno technologijos universitetas
  • R. Brucas
  • J. Dudonis

Abstract

We have studied the influence of Ti, Mo and Zr impurities on microstructure and electrical properties of copper coatings. It's been obtained that control of the size of crystallites and their orientation in the wide range, change of the resistivity of the coatings can be performed by changes in type of the impurities and substrate temperature.
Published
2016-07-14
Section
Articles