Analysis of Microelectrode Arrays for Dielectrophoresis using the Finite Element Method

  • J. Novickij Vilnius Gediminas Technical University
  • V. Novickij Vilnius Gediminas Technical University
  • V. Stankevic Vilnius Gediminas Technical University
  • A. Grainys Vilnius Gediminas Technical University
  • S. Tolvaisiene Vilnius Gediminas Technical University


Dielectrophoresis (DEP) force dependence on microelectrode array size parameters is presented in this work. Using finite element method numerical calculations for golden interdigitated electrodes have been performed and DEP force at nanometer heights dependence plots were made. Using theoretical modelling microelectrode width, spacing and thickness has been altered and gradient of electric field dependence plots have been analyzed. It was showed that electrode spacing reduction is the most effective way to achieve higher DEP forces. Also the influence of one size parameter on the gradient of electric field when the other two size parameters are being altered has been studied. It was determined that reduction of width below 10 μm when the spacing of the electrodes is less than 5 μm doesn’t have any impact on the gradient of electric field. Ill. 6, bibl. 9 (in English; abstracts in English and Lithuanian).