Modeling of Manufacturing Processes in EPIC Technology

  • V. Kašauskas Kaunas University of Technology
  • R. Anilionis Kaunas University of Technology
  • D. Eidukas Kaunas University of Technology

Abstract

EPIC technology is used for specialized IC formatting on the ground of transistor structures. The change of structure in IC manufacturing cycle is mostly determined by high temperature technological processes (HTTP) regiments, which influence diffuse layer dopant redistribution, and by this determine characteristics and manufacturing errors of elements formed. Main regiments of HTTP are considered time for structure formatting and technological process (TP) temperature. The main goal is to analyze and model the cycle of HTTP used in EPIC technology and their influence to ach other and current gain  and . IIl. 5, bibl. 8 (in English; summaries in English, Russian, Lithuanian).

Published
2015-03-29
Section
T 171 MICROELECTRONICS