Increasing the Observability of the Thin Films Manufacturing Process

  • D. Viržonis Kaunas University of Technology
  • V. Sinkevičius Kaunas University of Technology

Abstract

Thermal evaporation of solids is a technology of most common use during the industrial manufacturing of thin condensed films. The qualitatively new requirements for these films call to investigate a new common ways to improve the controllability and observability of the manufacturing process. The dynamic measurement of the electrical properties of the resistive evaporator power circuit is thought to be a reasonable solution for the observability improvement. An experimental data and the mathematical modeling of the evaporator power circuit and the thermal interaction between the evaporator and the evaporating material are described. The mathematical description of an entire process allows distinguishing between the informative and non-informative quantities measured. It is concluded that presented method is sufficient for in-situ evaporator temperature measurement during the manufacturing process. It does not require for the add-on instrumentation in the vacuum chamber of the evaporation system, therefore is acceptable for application in industrial conditions. Ill. 4, bibl. 7 (in English; summaries in Lithuanian, English, Russian).

Author Biographies

D. Viržonis, Kaunas University of Technology
V. Sinkevičius, Kaunas University of Technology
Published
2004-04-19
How to Cite
Viržonis, D., & Sinkevičius, V. (2004). Increasing the Observability of the Thin Films Manufacturing Process. Elektronika Ir Elektrotechnika, 53(4). Retrieved from http://eejournal.ktu.lt/index.php/elt/article/view/10939
Section
T 171 MICROELECTRONICS